학술논문
The application of silicon-on-insulator (SOI) technology for the fabrication of fully scanned active matrix flat panel displays
Document Type
Conference
Author
Source
Proceedings. IEEE International SOI Conference SOI conference SOI Conference, 1994 Proceedings., 1994 IEEE International. :97-98 1994
Subject
Language
Abstract
SOI technology is presently being used for the fabrication of both liquid crystal displays (LCDs) and electroluminescent (EL) displays. It has unique advantages for the fabrication of flat panel displays such as the production of devices with high performance and high breakdown voltage. It is the object of this paper to review the process technologies used in the fabrication of these displays and also to show the latest developments in these technologies.