학술논문
A Strategy for High-Mobility and Highly-Stable Oxide TFTs
Document Type
Conference
Source
2023 30th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2023 30th International Workshop on. :82-83 Jul, 2023
Subject
Language
Abstract
In this study, we show a reason why high-mobility oxide TFTs tends to exhibit poor reliability such as NBTS and PBTS. It is revealed that the NBTS mechanism is mainly attributed to the Fermi level shift of a-ITZO itself and it is highly dependent on the conduction band minimum location. Based on this background, we found that the charge transfer between ITZO active layer and CO-related impurities is responsible for NBTS instability. Consequently, we successfully developed a highly stable ITZO TFT with the mobility of 70 cm 2 /Vs by eliminating the CO-related impurities and the introduction of passivation layer.