부산대학교 도서관

This paper reports a novel method for fast simultaneous monitoring of gas concentrations in a gas mixture by using small micromachined sensors. The proposed method uses output data from multiple micromachined thermal conductivity detectors of different sensitivities. We confirmed that the fabricated sensors can accurately determine the concentrations of each of three gases in a mixture. The prototype sensor module was miniaturized to less than 1/200th the size of the conventional gas chromatography (GC) equipment. Demonstration tests were conducted in a CO 2 electrolysis cell, and each gas concentration was successfully monitored at intervals of 1.7 s, which is significantly faster than that of GC for a mixture of H 2 , CO 2 , and CO gases.