부산대학교 도서관

We report, for the first time, arrayable self-contained transient micropackets as building blocks to realize vaporizable electronics. Transience is controlled by a one-shot micro-valve, with 2.2 mJ trigger energy, 15.4 msec trigger-time and 100% triggering yield, which exposes nanoliter reactive rubidium droplets to air. The oxygen in air oxidizes the rubidium exothermically, generating heat that vaporizes the low-temperature degradable polymer substrate, which forms the substrate for the packets. Here we also demonstrate micro-packets of sodium biflouride (NaHF2), which decomposes on heating to etch 1 μm oxide electronics substrate in 1 minute. With co-packaging of rubidium and NaHF2, we demonstrate a pathway to fully transient packaged electronics.