학술논문
Single-Step Fabrication of Multispectral Filter Arrays Using Grayscale Lithography and Metal-Insulator-Metal Geometry
Document Type
Conference
Source
2018 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2018 Conference on. :1-2 May, 2018
Subject
Language
Abstract
Metal-insulator-metal geometries can provide optical transmission filtering, with peak wavelength dependent on insulator thickness. Using grayscale electron beam lithography to control insulator thickness, we fabricate multispectral filter arrays, whereby dose determines wavelength.