학술논문

New route for BST synthesis by soft chemistry
Document Type
Conference
Source
Proceedings of ISAF-ECAPD-PFM 2012 Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp. :1-3 Jul, 2012
Subject
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Silicon
Films
Substrates
X-ray scattering
Microstructure
Dielectrics
Titanium
BST
MOD
LNO
Dielectric
Language
ISSN
1099-4734
2375-0448
Abstract
The purpose of this work is to develop a new route for BST synthesis. BST thin film are produced by spin coating on an oriented LNO/Si substrate. The phase purity and possible crystalline orientation are determined by XRD. BST microstructure and texturation are discussed from detailed SEM images and capacitance measurement confirm the BST performances.