학술논문

Optical power regulator using closed-controlled MEMS variable optical attenuator (VOA)
Document Type
Conference
Source
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 1:595-598 vol.1 2003
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Signal Processing and Analysis
Optical attenuators
Regulators
Micromechanical devices
Fiber nonlinear optics
Nonlinear optics
Nonlinear systems
Hysteresis
Optical control
Proportional control
Control systems
Language
Abstract
This paper reports the development of an optical power regulator based on a surface-micromachined variable optical attenuators (VOAs). The VOA module has a size of about 0.6 mm/spl times/1 mm excluding the fibers. It requires only 8 V to obtain an attenuation range of 45 dB. Experiment shows the VOA itself is a nonlinear system and has hysteresis. By use of a digital proportional integration (PI) control system, the VOA module implements an optical power regulation with the functions of power set point tracking and disturbance rejection. The power regulator takes only 24 ms to track an output set point change of 11 dB without experiencing any overshoot. It is also able to reject the disturbance in about 100 ms.