부산대학교 도서관

This paper reports the development of a duo-bimorph cantilevered actuator made of PMN-PT material and intended for large-stroke micro-scale manipulation. The principle of operation is piezoelectric, but with a series of material-induced particularities: PMN-PT is reputed for its very high piezoelectric and electromechanical coupling characteristics, but exhibits a lower coercive field which prevents driving in a fully bipolar manner. Instead of the uniaxial [001] plate, by using the anisotropic [011] cut, a positive transverse d 31 piezoelectric coefficient may be exploited. This allows the extension of the structure with the applied voltage, which is particularly beneficial for micro-gripping. After an introductory part in piezo-materials and duo-bimorph structures, a comprehensive static three-dimensional displacement modeling is provided by means of constitutive matrix equations. The actuator micro-manufacturing is presented, followed by the experimental characterization. Compared to the classical PZT structures, the actuation is increased by a factor of two, up to 600 µm in the transversal plane and up to 20 µm longitudinally. Some perspectives related to 3 DoF (Degrees of Freedom) micro-manipulation tasks are finally approached.