학술논문
An air-spacer terahertz metamaterial perfect absorber for sensing and detection applications
Document Type
Conference
Author
Source
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :1999-2002 Jun, 2017
Subject
Language
ISSN
2167-0021
Abstract
We designed, fabricated, and characterized a metamaterial perfect absorber at terahertz (THz) frequency range utilizing air as the dielectric material. Due to the avoidance of the loss usually introduced by the dielectric material, there was a three times improvement of the quality factor. Also, with metamaterials fabricated on a free-standing silicon nitride membrane, high sensitivity can be achieved compared with traditional metamaterials on thick substrate. Moreover, the absence of the dielectric materials presents the special opportunity to use liquid or gas as the dielectric layer for permittivity characterization or sensing and detection purposes