학술논문
Heterogeneous integration in silicon photonics through micro-transfer-printing
Document Type
Conference
Author
Source
2019 24th Microoptics Conference (MOC) Microoptics Conference (MOC), 2019 24th. :64-65 Nov, 2019
Subject
Language
Abstract
Micro-transfer-printing enables the intimate integration of a wide range of opto-electronic micro-components on a silicon photonics platform. This technique allows for wafer-scale integration in a massively parallel manner with high alignment accuracy, high throughput and high yield, therefore leading to a cost reduction of complex photonic integrated circuits.