학술논문

Resonant thermal terahertz metasurface-based emitters on n-GaAs/GaAs
Document Type
Conference
Source
2022 47th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) Infrared, Millimeter and Terahertz Waves (IRMMW-THz),2022 47th International Conference on. :1-2 Aug, 2022
Subject
Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Signal Processing and Analysis
Semiconductor device modeling
Terahertz wave imaging
Three-dimensional displays
Shape
Metasurfaces
Harmonic analysis
Metamaterials
Language
ISSN
2162-2035
Abstract
Thermal metamaterial GaAs-based emitters operating in THz range were developed and investigated. Structures of desired parameters were simulated using 3D finite difference time domain method, and produced with a square geometry metasurface on the top structured by UV laser lithography. Depending on the metacell geometrical parameters the emission spectra of the heated samples (up to $400^{\circ}\mathrm{C})$ revealed resonant emission features in the range from 0.7 THz to 1.2 THz and the bandwidth of 0.29 THz. The demonstrated principle of using n-GaAs instead of metal bottom layer and unintentionally doped GaAs as dielectric spacer paves the way for thermal emitters compatible with III-V semiconductor system-based THz optoelectronics technology.