부산대학교 도서관

As technology advanced from bulky to the tremendous miniature feature size devices, the patterning process changes according to the technology in order to improving the quality of producing a tiny device. However, in research experiment, costing and ease of use is well preferred rather than high throughput outputs. Hence, such low cost photolithography technique which is a crucial part in fabrication process begins from mask design is introduced. A common mask printing on transparency film via inject printers comes in handy for low cost fabrication together with time saving and easy to generate. The only drawback is that printing dimension must not less than 100μm and definitely the bigger the size, the better the resolution of the transparency mask. On the other hand, the less devices that able to fit in a wafer. Design of this mask drawn using AutoCAD drawing tools using multiple trimmed circles that combined with a pair of contact pad. Tangible printed mask enable the next steps of photolithography to be proceed and patterns occurs upon completion.