학술논문
Development of an ultra-precision stage control system using nonresonant ultrasonic motor
Document Type
Conference
Author
Source
IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) Industrial electronics society Industrial Electronics Society, 2003. IECON '03. The 29th Annual Conference of the IEEE. 2:1331-1336 Vol.2 2003
Subject
Language
Abstract
This paper presents the development of an ultra-precision stage control system by introducing the nonresonant ultrasonic motor (NRUSM). System identification experiments are carried out considering the fundamental characteristic of NRUSM. The friction, which affects the accuracy of the positioning, is evaluated. Then the relation between the friction and the control bandwidth is experimentally examined. Using the frictional property as well as the identified model, the position control system with friction compensation is designed. Moreover, for its design the anti-windup-based wide band control is performed. Thus, the effectiveness of the identified model and the designed control system is verified by simulations and experiments.