학술논문

Engineering Porous Silicon-Based Plasmonic Microdisk Resonator for Highly Sensitive Methanol Sensing
Document Type
Periodical
Source
IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(8):12304-12311 Apr, 2024
Subject
Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Robotics and Control Systems
Sensors
Refractive index
Methanol
Plasmons
Optical resonators
Silicon
Sensitivity
microdisk resonator
optical sensor
plasmons
porous silicon (p-Si)
silicon photonics
Language
ISSN
1530-437X
1558-1748
2379-9153
Abstract
This study introduces a novel application of a plasmonic microdisk resonator as a highly sensitive sensor for detecting methanol vapor. Leveraging the inherent advantages of plasmonic nanostructures, the microdisk resonator demonstrates a remarkable capability to detect minute concentrations of methanol. In this work, we modeled a novel 3-D porous-silicon (p-Si)-based hybrid plasmonic aperture-coupled microdisk resonator (HPACMR) with specific dimensions and porosity to optimize the sensitivity toward methanol vapor detection. The resonator’s design incorporates a thin layer of copper on a dielectric microdisk, creating a plasmonic cavity that supports localized surface plasmon resonances. Finite element method-based simulations predict strong interactions between the resonator’s plasmonic field and methanol molecules, leading to detectable shifts in the resonant frequency. By tuning the layout dimensions and p-Si properties, we achieved an altitudinous sensitivity of 569.52 nm/RIU and a Q-factor of nearly 370. The sensors’ miniature footprint and potential for integration into portable devices make it an attractive candidate for field-deployable applications.