학술논문
Integration of PZT thin films on a microfluidic complex system
Document Type
Conference
Author
Source
2014 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2014 IEEE International. :491-494 Sep, 2014
Subject
Language
ISSN
1051-0117
Abstract
We present a new way to integrate state of the art sol-gel Pb(Zr,Ti)O 3 (PZT) thin-films on a microfluidic system and the first peristaltic micropump with active microvalves actuated by piezoelectric thin-films. Combination of both technologies enables to benefit of low voltage actuation and high precision. The micropump can produce a 3.6 µl/min flow for 24 V actuation voltage. It is a new step toward low consuming pumps for autonomous microfluidic systems, especially implanted devices for drug delivery.