학술논문

Low-insertion-loss compact 3D-MEMS optical matrix switch with 18 input/output ports
Document Type
Conference
Source
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:972-975 Vol. 1 2005
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Robotics and Control Systems
Signal Processing and Analysis
Optical switches
Optical arrays
Micromechanical devices
Optical collimators
Optical beams
Mirrors
Insertion loss
Assembly
Packaging
Loss measurement
Language
ISSN
2159-547X
2164-1641
Abstract
The paper describes a new three-dimensional (3D) MEMS optical switch. The switch consists of a collimator array for generating optical beams, and a MEMS mirror array for changing the directions of the beams. Each of the 18 optical ports can be either an input or an output, giving the switch a flexible configuration of 8/spl times/8, 2/spl times/16, and so on. The mirrors and the collimators are assembled passively in a compact package measuring 80/spl times/30/spl times/12 mm/sup 3/. The mean of measured insertion losses of all 64 paths in an 8/spl times/8 switch configuration was 1.1 dB; this confirms the low insertion loss of the developed switch.