부산대학교 도서관

We present a miniaturized lithium niobate (LiNbO 3 ) pyroelectric ionizer with enhanced ionization using copper electrodes attached to the LiNbO 3 crystal poled surfaces. The modified device shows a ∼2.4x improvement in ionization count, without any increase in the heating power applied to the crystal. The ionization events had peak and average ionization currents of 44.8 nA and 9.36 pA respectively. The ionizer includes an integrated temperature sensor for precise control of the thermal cycling of the crystal. The ion generation is done at atmospheric pressure, with low voltages, paving the way for the ionizer integration in a chip-scale compatible portable platform.