학술논문

A Comprehensive Cryogenic CMOS Variability and Reliability Assessment using Transistor Arrays
Document Type
Conference
Source
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Degradation
Temperature distribution
Scattering
Cryogenics
Phonons
Logic gates
Kinetic theory
Language
Abstract
Integrating CMOS circuits and qubits at cryogenic temperatures requires high-frequency operation in the GHz range together with ultra-low power consumption and very low noise figures. One approach to reduce power consumption is to optimize circuits towards operation at lower supply voltages. However, this reduces the tolerable margins on device-to-device variations and parameter degradation. In this study, we present a comprehensive overview on the time-zero performance, variability, and reliability of a 28 nm bulk CMOS technology using thousands of transistors measured from room temperature down to 4 K. Moreover, we present a quantum-mechanical extension of the nonradiative multiphonon (NMP) model derived from bias temperature instability (BTI) measurements on long-channel transistors of the same technology to explain charge trapping kinetics at cryogenic temperatures.