학술논문

Electrical modelling of LSCRs in deep submicron CMOS technologies for circuit-level simulation of ESD protection structures
Document Type
Conference
Source
2003 Proceedings of the Bipolar/BiCMOS Circuits and Technology Meeting (IEEE Cat. No.03CH37440) Bipolar/BiCMOS circuits and technology Bipolar/BiCMOS Circuits and Technology Meeting, 2003. Proceedings of the. :97-100 2003
Subject
Power, Energy and Industry Applications
Signal Processing and Analysis
Components, Circuits, Devices and Systems
Computing and Processing
Communication, Networking and Broadcast Technologies
Thyristors
Semiconductor device modeling
Electrostatic discharges
CMOS integrated circuits
Overcurrent protection
Silicon
Language
ISSN
1088-9299
Abstract
This paper presents an electrical model of a parasitic LSCR that represents the inner currents before and after triggering. It relies on the standard LSCR model before triggering, and on a PiN diode model for the post-triggering behaviour. As an illustration, the model has been validated against silicon in both 0.18/spl mu/m and 0.13/spl mu/m technologies.