학술논문
A novel SCR-based protection structure against ESD with efficient multi-finger triggering
Document Type
Conference
Author
Source
ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003. Solid-state device research - ESSDERC '03 European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on. :207-210 2003
Subject
Language
Abstract
In this paper, a new SCR-based protection structure is presented relying on the bimodal operation of an LSCR. STMSCR (smart triggered multi-finger SCR) is multi-finger compliant, thus allowing area-efficient design of pad-located ESD protection. Without any process customisation, an HBM failure threshold over 115 V//spl mu/m is reached for the first time while always ensuring current uniformity in multi-finger structures.