학술논문

Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition
Document Type
Conference
Source
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :1798-1801 Jun, 2015
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Thermal sensors
Sensor systems
Permittivity measurement
Permittivity
Thermal conductivity
Capacitive sensors
Coriolis flow sensor
thermal flow sensor
pressure sensor
relative permittivity sensor
multiparameter measurement system
microfluidic system
Language
ISSN
2159-547X
2164-1641
Abstract
We have designed and realised a fully integrated microfluidic measurement system for real-time determination of both flow rate and composition of gas- and liquid mixtures. The system comprises relative permittivity sensors, pressure sensors, a Coriolis flow and density sensor, a thermal flow sensor and a thermal conductivity sensor. The composition of the mixture can be calculated from the physical properties - density, viscosity, heat capacity, thermal conductivity and relative permittivity - as measured by the integrated sensors in the system.