학술논문

Embedded ground planes using sidewall insulators for high frequency interconnections in integrated circuits
Document Type
Conference
Source
Proceedings of IEEE International Electron Devices Meeting Electron devices Electron Devices Meeting, 1993. IEDM '93. Technical Digest., International. :251-254 1993
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Insulation
Frequency
Integrated circuit interconnections
Delay
Impedance
Scattering parameters
Transmission line measurements
Integrated circuit measurements
Transfer functions
Fourier transforms
Language
ISSN
0163-1918
Abstract
Cross-talk disturbance and signal delay from interconnections are intensifying as dimensions reduce and circuit frequencies increase, significantly impacting the performance of integrated circuits. A new structure called an embedded ground plane with sidewall insulators can be used to control the impedance and reduce cross talk and dispersion of signals. The S-parameters of 0.3 /spl mu/m lines with ground planes were measured up to 18 GHz and used to obtain the propagation function. The parasitics from the pads was eliminated using a new dc-embedding technique based on T-matrices. The resulting transmission line transfer function is then used to simulate the pulse response of interconnections using Fourier transforms.ETX