학술논문
Investigation of the Formation Mechanism of Hemispherical Grained Silicon (HSG-Si) on Undoped and Doped Amorphous Silicon for DRAM Applications
Document Type
Conference
Author
Source
29th European Solid-State Device Research Conference Solid-State Device Research Conference, 1999. Proceeding of the 29th European. 1:232-235 1999
Subject
Language