학술논문
A Three Dimensional Microflown
Document Type
Conference
Source
19th IEEE International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. :654-657 2006
Subject
Language
ISSN
1084-6999
Abstract
An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.