학술논문
Latest Progress and Challenges in 300 mm Monolithic Silicon Photonics Manufacturing
Document Type
Conference
Author
Hirokawa, Takako; Bian, Yusheng; Giewont, Ken; Aboketaf, Abdelsalam; Chandran, Sujith; Cho, Jae-Kyu; Chowdhury, Zahidur; Lee, Won Suk; Liu, Qidi; Sharma, Prateek; Sorbara, Massimo; Anderson, Frederick G.; Barakat, Farid; Dasgupta, Arpan; Dezfulian, Kevin; Houghton, Thomas; Kim, Jason; Lin, Yarong; Robson, Norman; Ruparelia, Vaibhav; Song, Shenghua; Sporer, Ryan; Tang, Teck-Jung; Tinkler, Janet; Wong, Helen; Zhang, Michelle
Source
2024 Optical Fiber Communications Conference and Exhibition (OFC) Optical Fiber Communications Conference and Exhibition (OFC), 2024. :1-3 Mar, 2024
Subject
Language
Abstract
In this paper we discuss the latest developments in the GlobalFoundries Fotonix™ program, including enhancements in device performance, packaging, PDK compact models, and inhouse test capabilities.