학술논문
Monolithic Silicon Photonics
Document Type
Conference
Author
Letavic, T.; Sorbara, Massimo; Geiwont, Ken; Bian, Yusheng; Jain, Vihbor; Jain, Sameer; Ramachandran, Koushik; Wu, Zhuo-Jie; Hedrick, Brittany; Dezfulian, Kevin K.; Lin, Yarong; Tang, Teck Jung; Houghton, Thomas; Fisher, Daniel; Hirokawa, Takako; Esopi, Monica; Karra, Vaishnavi; Lee, Won Suk; Zhang, Michelle; Lubguban, Ryan Sporer Jorge; Cho, Jae Kyu; Cao, Rongtao; Ding, Hanyi; Chandran, Sujith; Rakowski, Michal; Aboketaf, Abdelsalam; Krishnamurthy, Subramanian; Mills, Scott; Robson, Norman; Melville, Ian; Fox, Robert; Gupta, Vikas; Yu, Anthony
Source
2023 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS) BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS), 2023 IEEE. :263-269 Oct, 2023
Subject
Language
ISSN
2831-4999
Abstract
This paper details a monolithic approach to the integration of photonic systems. Polarization diverse photonic components are fabricated in a 45nm silicon-on-insulator microelectronics process flow which includes digital and RFCMOS, high performance analog mixed signal, mmWave components, electro-thermal and electro-optic control elements, and fiber and laser attach. This results in a single chip optical transceiver solution.