학술논문
Precise Measurement of Inhomogeneity of 2-D System by Six-Point Method
Document Type
Periodical
Author
Source
IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 66(6):1243-1247 Jun, 2017
Subject
Language
ISSN
0018-9456
1557-9662
1557-9662
Abstract
Nondestructive, quantitative determination of inhomogeneity degree of 2-D system by the measurement of electrical properties is presented. Six point contacts have to be located at arbitrary positions on the sample edge. The sheet resistivity and the inhomogeneity parameter are determined simultaneously by the measurement of nine so-called four-probe resistances. The method is global, i.e., the local inhomogeneity will be always detected irrespectively of their location.