학술논문
Precise measurement of inhomogeneity of two dimensional system by six point method
Document Type
Conference
Author
Source
2016 Conference on Precision Electromagnetic Measurements (CPEM 2016) Precision Electromagnetic Measurements (CPEM 2016), 2016 Conference on. :1-2 Jul, 2016
Subject
Language
ISSN
2160-0171
Abstract
Nondestructive, quantitative determination of inhomogeneity degree of two dimensional system by measurement of electrical properties is presented. Six point contacts have to be located at arbitrary positions on the sample edge. The sheet resistivity and the inhomogeneity parameter are determined simultaneously by measurement of nine so called four-probe resistances. The method is global i.e. the local inhomogeneity will be always detected irrespectively of their location.