학술논문

Copper-Copper Ultrasonic Bonding by Using Blue Laser-Sintered Copper Nanoparticles
Document Type
Conference
Source
2022 International Conference on Electronics Packaging (ICEP) Electronics Packaging (ICEP), 2022 International Conference on. :61-62 May, 2022
Subject
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Nanoparticles
Silicon carbide
Power lasers
Laser sintering
Laser modes
Acoustics
Copper
die bond
ultrasonic bonding
laser sintering
porous copper
Language
Abstract
The high thermal dissipation is one of the most urgent issues for the diverse utilization of advanced power electronic devices (SiC, GaN, GaO). Adoption of sub¬micrometer sized copper particles as die bonding materials could be a solution in terms of its high performance and material cost. In this study we investigated the copper-copper ultrasonic bonding using by porous pre-sintered copper layer with relatively low-power blue laser to apply as the bonding method. The results showed that rapid copper-copper bonding could be achieved by ultrasonic bonding with the homogenous layer by plastic deformation of porous sintered layer.