학술논문
Ellipsometry for Measurement of Complex Dielectric Permittivity in Millimeter-Wave Region
Document Type
Conference
Source
2003 33rd European Microwave Conference Microwave Conference, 2003 33rd European. :487-490 Oct, 2003
Subject
Language
Abstract
The ellipsometry method is extended to a measurement for complex permittivities of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.