학술논문

Features of Field Emission and Formation of Electron Beam in a Multi-Electrode Planar Cathode
Document Type
Conference
Source
2018 International Conference on Actual Problems of Electron Devices Engineering (APEDE) Actual Problems of Electron Devices Engineering (APEDE), 2018 International Conference on. :249-252 Sep, 2018
Subject
Communication, Networking and Broadcast Technologies
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Cathodes
Carbon dioxide
Nanoscale devices
Electron beams
Process control
Language
Abstract
The results of investigations of physical processes in a multi-electrode planar three-level structure with field emission are presented. It is determined how the topology of elements affects the quality of electronic transport to an anode. A solution has been found that provides a fundamental reduction in the current trapping by control electrodes. The efficiency is confirmed by the results of tests of the manufactured vacuum device, the current transmission at the level of 80-98% is ensured in the entire range of variation of the gate potential.