학술논문

Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning
Document Type
Periodical
Source
IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(9):13903-13913 May, 2024
Subject
Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Robotics and Control Systems
Probes
Mirrors
Micromechanical devices
Optical interferometry
Endomicroscopy
Electrothermal actuators
Optical imaging
Endomicroscopy probe
Lissajous scanning
micro-electromechanical systems (MEMS) two-axis electrothermal actuator
micro-opto-electromechanical systems (MOEMS) Mirau microinterferometer
optical coherence tomography (OCT)
Language
ISSN
1530-437X
1558-1748
2379-9153
Abstract
This article presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau microinterferometer fabricated in micro-opto-electromechanical systems (MOEMS) technology, and a two-axis electrothermal actuator fabricated in micro-electromechanical systems (MEMS) technology, connected with a gradient-index (GRIN) lens collimator and single-mode fiber. Herein, we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of this article is 2-D and 3-D imaging of phantom structures, based on polymer material, light-scattering material, and USAF-target pattern visualized with an endomicroscopy probe. The imaging was obtained by the swept source optical coherence tomography (SS-OCT) technique, working at a central wavelength $\lambda _{c}$ = 1060 nm, a swept range $\Delta \lambda $ = 100 nm, an A-scan rate ${f}_{a}$ = 200 kHz, and the scanning of samples with the use of Lissajous curves.