학술논문
Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning
Document Type
Periodical
Author
Source
IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(9):13903-13913 May, 2024
Subject
Language
ISSN
1530-437X
1558-1748
2379-9153
1558-1748
2379-9153
Abstract
This article presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau microinterferometer fabricated in micro-opto-electromechanical systems (MOEMS) technology, and a two-axis electrothermal actuator fabricated in micro-electromechanical systems (MEMS) technology, connected with a gradient-index (GRIN) lens collimator and single-mode fiber. Herein, we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of this article is 2-D and 3-D imaging of phantom structures, based on polymer material, light-scattering material, and USAF-target pattern visualized with an endomicroscopy probe. The imaging was obtained by the swept source optical coherence tomography (SS-OCT) technique, working at a central wavelength $\lambda _{c}$ = 1060 nm, a swept range $\Delta \lambda $ = 100 nm, an A-scan rate ${f}_{a}$ = 200 kHz, and the scanning of samples with the use of Lissajous curves.