학술논문
Aerosol impactor with embedded MEMS resonant mass balance for real-time particulate mass concentration monitoring
Document Type
Conference
Source
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :661-664 Jun, 2013
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
This work presents integration of a MEMS resonant mass balance within an aerosol impactor capable of sampling airborne micro to nanoscale particles. The resonant mass balance provides real-time high resolution information on particulate mass concentrations, which is a unique capability for miniaturized aerosol impactors. A relatively simple approach has been devised to overcome the main challenge of aligning the microscale resonant devices to the impactor nozzle. Tests performed on air samples from different environments with different particle mass concentrations ranging from 0.02–0.4μg/m 3 demonstrate a clear correlation between the resonator response and the expected particle concentrations (particles larger than 130nm).