학술논문
Superlubricity mechanism for micro electro mechanical systems
Document Type
Conference
Author
Source
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots Micro electro mechanical systems Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on. :436-441 1997
Subject
Language
ISSN
1084-6999
Abstract
A new regime of friction-superlubricity-where friction completely vanishes has recently been discovered. This paper discusses superlubricity mechanisms, which can be utilized for Micro Electro Mechanical Systems (MEMS), such as microvalves and micro-assembly systems. From studying friction properties such as the dependence of interfacial lattice misfits and of normal load, it is found that superlubricity is stable under high contact pressure conditions. Experimental evidence of superlubricity is presented by examining systems of sliding atomically clean surfaces by using ultra-high vacuum scanning tunneling microscopy. We have, consequently, proposed the methods for controlling friction and for bonding surfaces by using the superlubricity mechanisms.