학술논문

Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics
Document Type
Periodical
Source
IEEE Photonics Journal IEEE Photonics J. Photonics Journal, IEEE. 10(3):1-8 Jun, 2018
Subject
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Optical waveguides
Plasmons
Photonics
Couplings
Gold
Optical device fabrication
Surface waves
Photonic integrated circuits
plasmonics
surface plasmons
directional coupling
plasmonic waveguide
silicon nitride
vertical integration.
Language
ISSN
1943-0655
1943-0647
Abstract
We demonstrate a water cladded plasmo-photonic waveguide, by exploiting the directional coupling scheme to vertically divert light from a 360 × 800 nm (height × width) Si 3 N 4 waveguide to a plasmonic slot waveguide, enabling the excitation of a pure plasmonic mode within a 210-nm-wide slot at 1550 nm. The 150-nm-thick plasmonic slot waveguide was deposited on the top of an oxide cladded Si 3 N 4 waveguide exhibiting an experimental plasmonic-to-photonic insertion loss of 2.24 ± 0.3 dB and a plasmonic propagation length ( L spp ) of 10.8 μm at 1550 nm. The proposed plasmo-photonic waveguide holds a promise as an optical transducer element for highly sensitive and low-cost interferometric biosensors due to the significant phase change achieved per unit propagation length.