학술논문
High-density lithium niobate integrated photonics
Document Type
Conference
Author
Source
2023 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2023 Conference on. :1-2 May, 2023
Subject
Language
Abstract
We demonstrate a strip waveguide-based LiNbO 3 photonic integrated circuit fabricated with a novel hard mask, diamond-like-carbon (DLC). The steep sidewall configuration exhibits tight optical confinement and dispersion control while preserving ultra-low loss of < 4 dB/m. In the meantime, a low noise self-injection locked laser is achieved with our chips.