학술논문
Layout Guidelines against Charging Damage from the Well-Side Antennas in Separated Power Domains
Document Type
Conference
Author
Source
2024 IEEE International Reliability Physics Symposium (IRPS) International Reliability Physics Symposium (IRPS), 2024 IEEE. :1-6 Apr, 2024
Subject
Language
ISSN
1938-1891
Abstract
In this paper, we propose layout guidelines to significantly mitigate the charging damage from well-side antennas in separated power domains. We specifically focus on the circuit topologies that consist of aggressor-victim pairs. The guidelines are based on the silicon data from the test patterns that cover adequate combinations of different geometries of isolation wells, metals, and vias, as well as different well configurations. The method has been verified in 0.13µm BCD (Bipolar-CMOS-DMOS) process using NBL (N-type Buried Layer) as the isolation well.