학술논문
Bulk micromachined electrostatic beam steering micromirror array
Document Type
Conference
Author
Source
IEEE/LEOS International Conference on Optical MEMs Optical MEMS Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on. :15-16 2002
Subject
Language
Abstract
Large area, 320-mirror arrays have been fabricated using a combination of bulk micromachining of SOI wafers and anodic bonding. Each silicon mirror is 750/spl times/800 /spl mu/m/sup 2/ and 14 /spl mu/m thick, coated with a /spl sim/0.1 /spl mu/m-thick layer of Au. The bulk silicon mirrors are electrostatically actuated with shaped parallel plate electrodes placed 86 /spl mu/m below, and they can be stably oriented anywhere in a /spl plusmn/5/spl deg/ (mechanical) two-dimensional box with voltage drives as low as 60 V.