학술논문

Increase of Expansion Rate and Direction Control of Microgel Actuators for Single Cell Manipulations
Document Type
Conference
Source
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :80-83 Jan, 2023
Subject
Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Fabrication
Micromechanical devices
Actuators
Microorganisms
Deformation
Process control
Proposals
Gel actuator
Cell manipulation
On-chip actuator
PNIPAAm
Lift-off process
Language
ISSN
2160-1968
Abstract
We propose a partial-constraint and side constraint fabrication process of gel actuators to increase expansion rates and control direction of actuation. We patterned dextran as a sacrificial layer to realize partially peel off gel actuator from a substrate. Furthermore, we change the constraint location from bottom to side of gel actuator by peeling off from a substrate. By decreasing constraint area and changing constraint location, we succeeded in increasing volume expansion rates of gel actuators from 1.7 to 5.0 and length expansion rates of gel actuators from 1.1 to 1.9. Furthermore, by changing constraint location, we succeeded in controlling directions of actuations of gel actuators. Finally, we demonstrate a mechanical stimulation device to stimulate living microorganisms by using the proposed method.