학술논문

Observer-Based 3-D Control Enhancement for Topographic Imaging—Validation With an STM Prototype
Document Type
Periodical
Source
IEEE Transactions on Control Systems Technology IEEE Trans. Contr. Syst. Technol. Control Systems Technology, IEEE Transactions on. 29(3):1075-1086 May, 2021
Subject
Signal Processing and Analysis
Communication, Networking and Broadcast Technologies
Computing and Processing
Robotics and Control Systems
Tunneling
Mathematical model
Couplings
Observers
Piezoelectric actuators
Microscopy
Control-based observer
nanometric precision control
observer design
PI controller
scanning tunneling device
topographic imaging
Language
ISSN
1063-6536
1558-0865
2374-0159
Abstract
This article proposes a control method using online state estimation techniques in order to enhance the capabilities of classical PI controllers as well as to improve the topographic imaging for an experimental scanning tunneling microscope-like device. In particular, a set of robust observers are designed following a recently proposed technique that takes advantage of control strategies in order to build such estimators. All three directional axes of such a subnanometric imaging device are controlled using the proposed method in order to obtain better images of a scanned surface. Real-time results for topographic imaging of a graphite sample are presented in order to illustrate the performances of the proposed method.