학술논문

1.3-$\mu$ m Two-Section DBR Lasers Based on Surface Defined Gratings for High-Speed Telecommunication
Document Type
Periodical
Source
IEEE Photonics Technology Letters IEEE Photon. Technol. Lett. Photonics Technology Letters, IEEE. 23(7):411-413 Apr, 2011
Subject
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Gratings
Distributed feedback devices
Distributed Bragg reflectors
Surface emitting lasers
Indium phosphide
Laser feedback
Distributed Bragg reflector (DBR) lasers
InP inductively coupled plasma reactive ion etching (ICP-RIE)
nanoimprint
optoelectronic devices
semiconductor lasers
Language
ISSN
1041-1135
1941-0174
Abstract
InP-based two-section distributed Bragg reflector lasers employing surface defined lateral gratings, which are compatible with low-cost nanoimprint technology, were fabricated. A newly developed inductively coupled plasma reactive ion etching process was utilized for obtaining large aspect ratios and good device performance. The lasers operate in a single mode up to 50 $^{\circ}\hbox{C}$ under continuous-wave conditions. A modulation bandwidth of about 10 GHz was obtained for 0.9-mm-long devices.