학술논문
High-resolution sub-surface microscopy of CMOS integrated circuits using radially polarized light
Document Type
Conference
Author
Source
2015 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2015 Conference on. :1-2 May, 2015
Subject
Language
ISSN
2160-8989
Abstract
Comparison of high-resolution sub-surface microscopy shows that illumination with linear polarization resolves an edge with resolutions of 95 nm and 120 nm, depending on E-field orientation, while radial polarization achieves a resolution of 98 nm.