부산대학교 도서관

We investigated the positive threshold voltage ( ${V}_{\text {th}}{)}$ shift with hump and on-current ( ${I}_{\text {on}}{)}$ reduction in top-gate In-Ga-Zn-O (IGZO) thin film transistors (TFTs) after negative gate bias of −20 V at 60°C and light irradiation stress (NBTIS). This degradation can be classified into three types of mechanism. 1. The hump at low gate voltage ( ${V}_{\text {g}}{)}$ is a sub-transistor effect caused by hole trapping at the IGZO/top gate insulator (TGI) interface. 2. The positive shift of ${V}_{\text {th}}$ is caused by the trapped photo-induced electrons at the IGZO/bottom gate insulator (BGI) interface. 3. The ${I}_{\text {on}}$ reduction occurred due to trapped photo-induced electrons at interface between $\text{n}^{-}$ region of IGZO/BGI interface. The electric field induced by trapped electron promotes depletion of the channel region at the IGZO/BGI and IGZO/TGI interface and $\text{n}^{-}$ region of IGZO/BGI interface, which corresponds to a drop in effective gate and drain voltage, respectively. Thus, the positive ${V}_{\text {th}}$ shift and ${I}_{\text {on}}$ reduction occurred due to trapping of photo-induced electron under NBTIS. Based on our proposed mechanism, this degradation was suppressed by the dual-gate structure.