학술논문
Foundry-compatible Hybrid Silicon / Lithium Niobate Electro-Optic Modulator
Document Type
Conference
Author
Source
2018 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2018 Conference on. :1-2 May, 2018
Subject
Language
Abstract
A foundry-compatible hybrid silicon-lithium niobate electro-optic modulator with an optical bandwidth greater than 6 GHz is presented. Wafer-scale photolithography processing is used to fabricate silicon features before bonding to a 600 nm lithium niobate film.