학술논문
CMOS-Compatible Contacts for Si Photonics from Solid-State Reaction to Laser Integration
Document Type
Conference
Author
Source
2018 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2018 IEEE International. :19-21 Jun, 2018
Subject
Language
ISSN
2380-6338
Abstract
From surface preparation and solid-state reaction to laser integration, a short overview of the CMOS-compatible contacts developed in our group on n-InP and p-InGaAs for Si photonic applications is proposed.