부산대학교 도서관

Previous works on MEMS actuated Fabry-Perot interferometer (FPI) highlighted promising results for flexible display applications. Three primary color pixels have indeed been obtained using both photolithography [1] and Roll-to-Roll printing process [2] with satisfying color purity and transmittance. However both of these processes are expensive and time-consuming for preparing master micropatterns. For these reasons, a new process based on inkjet printing has been set up. It contributes in a more ecological-friendly, high reproducible and fast process development while targeting improved features.