학술논문

Analysis and design of an efficient microwave plasma source by using the principle of variable impedance waveguide
Document Type
Conference
Source
2023 Second International Conference On Smart Technologies For Smart Nation (SmartTechCon) Smart Technologies For Smart Nation (SmartTechCon), 2023 Second International Conference On. :799-803 Aug, 2023
Subject
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Temperature measurement
Tuners
Thermocouples
Electromagnetic waveguides
Plasma measurements
Thermal conductivity
Thermal analysis
High-frequency electromagnetic waves
thermal plasma
waveguide
magnetic resonance heating
Language
Abstract
We conducted an analysis and design process to develop a high-frequency electromagnetic thermal plasma source. As part of this endeavor, we designed a standard square waveguide, specifically the WG9A (WR340), operating at a frequency of 2.45 GHz. We implemented two versions of the waveguide, one with a tuner stub and one without, to assess their respective efficiency in producing the desired plasma flare. During the experimentation phase, we employed an electromagnetic wave source with a power output of 1.5 kW. We measured the reflection coefficient (S11) and transmission coefficient (S21) of both waveguides, as well as the temperature of the resulting plasma flame. A thermocouple was employed to measure the maximum temperature achieved, which was recorded at 1,025 °C. Overall, our analysis and experimentation process involved designing the high-frequency electromagnetic thermal plasma source using a standard square waveguide at 2.45 GHz, both with and without a tuner stub. We then assessed the efficiency of the two waveguides in generating the desired plasma flare, taking into account measurements of the reflection and transmission coefficients, along with the temperature of the plasma flame. Our findings indicated a maximum plasma temperature of 1,025 °C, as determined by a thermocouple during the experiment.