학술논문
Magnet arrays for use in a 3-D MEMS mirror array for optical switching
Document Type
Conference
Author
Source
Digest of INTERMAG 2003. International Magnetics Conference (Cat. No.03CH37401) INTERMAG Magnetics Conference, 2003. INTERMAG 2003. IEEE International. :CQ-01 2003
Subject
Language
Abstract
In this paper, we present magnet array development as part of 3D electromagnetic MEMS mirror arrays for use in optical switching applications. An electromagnetic mirror array uses an external array of magnets positioned under the array of mirrors to provide a strong magnetic field at the mirrors. Each mirror contains multiple coils which interact with the external magnetic fields to produce two orthogonal torques.