부산대학교 도서관

Micro Electromechanical Systems (MEMS) relays consists of three types of relay based on actuation methods; electrostatic, electrothermal and electromagnetic. This paper focuses on electromagnetic micro relay only. The study will focus on analyzing the magnetic behaviors of a specific electromagnetic micro relay. It involves validation of results and data acquisition. Investigations on magnetic behaviors of the electromagnetic micro relay are performed via Finite Element Analyses upon a constructed model in ANSYS. The data obtain are in form of magnetic torques in x, y location of the plane by varying the current density on the EM planar coil on the micro relay structure, thickness of the armature, and air gap between the permanent magnet and EM planar coil. These results provide a good insight of the magnetic behavior of the investigated electromagnetic micro relay which will be very useful in designing an electromagnetic micro relay.