부산대학교 도서관

The laser lithography based on direct laser writing process (DLW) using nonlinear two-photon absorption in the focus of the laser beam in photoresist volume seems to be very promising in future photonics. This technology allows fabrication of polymer based structures in three dimensions achieving submicrometer resolutions and acceptable optical quality. Here we present four areas where three dimensional (3D) DLW laser lithography was used for 3D components fabrication: photonic crystal structures, photonic devices for waveguide optics, microstructures for lab on fiber and structures for lab on a chip.